Title :
Vibrating capacitor: applications in the research of semiconductor gas sensors
Author_Institution :
Dept. of Electron Devices, Budapest Univ. of Technol. & Econ., Hungary
Abstract :
Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO2 layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.
Keywords :
adsorption; atomic layer epitaxial growth; gas sensors; semiconductor devices; work function; Pd; SnO2; adsorption; atomic layer epitaxy; catalytically active surfaces; chemical pictures; olfactory pictures; palladium activator covered surfaces; palladium nanolayer covered surfaces; semiconductor gas sensors; semiconductor surfaces; thin tin dioxide layer; vibrating capacitor method; work function shifts; Capacitors; Chemicals; Current measurement; Electric variables measurement; Electrodes; Gas detectors; Olfactory; Semiconductor materials; Vibration measurement; Voltage;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426328