Powerful tools for thermal characterisation of MEMS

Author

Fürjes, P. ; Bognár, Gy ; Bársony, I.

Author_Institution

Res. Inst. for Tech. Phys. & Mater. Sci. - MFA, Budapest, Hungary

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

1109

Abstract

Thermal aspects of the design and fabrication of sensor structures based on thermally isolated heater filaments (Ducso, Cs. et al., Sensors and Actuators, vol.A60, p.235-9, 1997) were investigated with special attention to their dynamic properties. Thermal engineering was aided by high performance simulation methods, such as finite element modelling (COSMOS) and thermal equivalent circuit simulation using successive network reduction (SUNRED) method. The detailed static and dynamic thermal behaviour of the structure was experimentally characterised applying the high resolution thermography system of Thermosensorik GmbH and the thermal transient tester (T3Ster) of MicReD Ltd.

Keywords

gas sensors; infrared imaging; microsensors; temperature sensors; thermal variables measurement; MEMS thermal characterisation; dynamic thermal behaviour; finite element modelling; gas sensor; high resolution thermography; mass flow sensor; sensor structures; static thermal behaviour; thermal equivalent circuit simulation using successive network reduction; thermal transient tester; thermally isolated heater filaments; Actuators; Circuit simulation; Equivalent circuits; Fabrication; Finite element methods; Micromechanical devices; Power engineering and energy; Sensor phenomena and characterization; Thermal engineering; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426370

Filename

1426370