Micro-fluxgate sensor incorporating solenoid coil and BCB dielectric

Author

Park, Hae-Seok ; Shim, Dong-Sik ; Hwang, Jun-Sik ; Choi, Sang-On

Author_Institution

Nano Fabrication Center, Samsung Adv. Inst. of Technol., Suwon, South Korea

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

1133

Abstract

In this paper, a miniaturized fluxgate sensor with high sensitivity is presented by increasing the permeability of the magnetic material. The fluxgate sensor is composed of a rectangular-ring shaped magnetic core and closely coupled solenoid excitation and pick-up coils. In order to induce magnetic anisotropy, the magnetic core (permalloy) was electroplated under an external magnetic field of 7000 gauss. We designed three types of fluxgate sensors with a change of magnetic core size and solenoid coil turn number. Excellent linear responses of these sensors were obtained with more than 117 V/T sensitivity over the range of -200 μT to +200 μT. And the size of the smallest micro-fluxgate sensor was about 1.3×0.7 mm², excluding pad region.

Keywords

Permalloy; electroplated coatings; fluxgate magnetometers; magnetic anisotropy; magnetic cores; magnetic permeability; magnetic sensors; microsensors; solenoids; -200 to 200 muT; 0.7 mm; 1.3 mm; 7000 gauss; BCB dielectric; benzocyclobutene; closely coupled coils; electroplated magnetic core; electroplating; external magnetic field; magnetic anisotropy; magnetic core size; magnetic material permeability; magnetic sensors; micro magnetic sensors; micro-fluxgate sensor; permalloy; pick-up coil; rectangular-ring shaped magnetic core; solenoid coil turn number; solenoid excitation coil; Coils; Couplings; Dielectrics; Magnetic anisotropy; Magnetic cores; Magnetic fields; Magnetic materials; Magnetic sensors; Permeability; Solenoids;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426376

Filename

1426376