Integrated ceramic temperature sensors for harsh environments [turbine measurements]

Author

Gregory, Otto J. ; You, Tao

Author_Institution

Dept. of Chem. Eng., Rhode Island Univ., Kingston, RI, USA

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

1165

Abstract

In this paper, ceramic thermocouples prepared with ITO (indium-tin-oxide) thermoelements having very different charge carrier concentrations were demonstrated in both open flame burner rig tests and furnace tests at temperatures approaching 1250°C. Ceramic RTDs (resistance temperature detectors) based on ITO were also thermally cycled in various oxygen partial pressures and the resulting temperature coefficients of resistance were stable and nearly independent of oxygen partial pressure at temperatures above 700°C. Based on these results, a multifunctional sensor has been developed which incorporates a ceramic RTD, a ceramic strain sensor and a ceramic thermocouple on a common substrate.

Keywords

carrier density; ceramic packaging; indium compounds; resistance thermometers; strain sensors; temperature sensors; thermocouples; tin compounds; turbines; 1250 degC; 700 degC; ITO; ITO thermoelements; InSnO; O₂; TCR; ceramic RTD; ceramic strain sensor; ceramic thermocouples; charge carrier concentrations; furnace tests; harsh environment sensors; integrated ceramic temperature sensors; multifunctional sensor; partial pressures; resistance temperature detectors; temperature coefficient of resistance; thermal cycling; turbine measurements; Ceramics; Charge carriers; Electrical resistance measurement; Fires; Indium tin oxide; Temperature sensors; Testing; Thermal resistance; Thermal sensors; Turbines;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426384

Filename

1426384