Dynamic analysis of a snap-action micromechanism

Snap-action bistable mechanisms have a practical use in applications when very few but well defined and repeatable states of a micro-mechanism are required. Some obvious applications include micro-switches, addressable MEMS-based pixel arrays, and tunable optical filters. We have explored the dynamic switching phenomena analytically and experimentally. This paper reports on a detailed mathematical model governing the non-linear response of a bistable micromechanism in its bistable equilibrium, analytical results describing non-linear dynamics of the mechanism near its equilibrium state and transient dynamics of switching between bistable states, and design, fabrication, and characterization results bistable micromechanism in their upper bistable equilibrium.