Dynamic analysis of a snap-action micromechanism

Author

Casals-Terre, Jasmina ; Shkel, Andrei

Author_Institution

Dept. of Mech. Eng., UPC, Terrassa, Spain

fYear

2004

fDate

24-27 Oct. 2004

Firstpage

1245

Abstract

Snap-action bistable mechanisms have a practical use in applications when very few but well defined and repeatable states of a micro-mechanism are required. Some obvious applications include micro-switches, addressable MEMS-based pixel arrays, and tunable optical filters. We have explored the dynamic switching phenomena analytically and experimentally. This paper reports on a detailed mathematical model governing the non-linear response of a bistable micromechanism in its bistable equilibrium, analytical results describing non-linear dynamics of the mechanism near its equilibrium state and transient dynamics of switching between bistable states, and design, fabrication, and characterization results bistable micromechanism in their upper bistable equilibrium.

Keywords

design engineering; microactuators; microswitches; semiconductor device models; semiconductor device testing; transient analysis; MEMS; addressable MEMS-based pixel arrays; bistable equilibrium; bistable micromechanism nonlinear response; bistable states; characterization; design; dynamic analysis; dynamic switching phenomena; fabrication; mathematical model; micro-mechanism; micro-switches; nonlinear dynamics; repeatable states; snap-action bistable mechanisms; transient switching dynamics; tunable optical filters; Electrostatic actuators; Fasteners; Mechanical engineering; Microswitches; Nonlinear dynamical systems; Optical arrays; Optical switches; Resonance; Resonant frequency; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2004. Proceedings of IEEE

Print_ISBN

0-7803-8692-2

Type

conf

DOI

10.1109/ICSENS.2004.1426406

Filename

1426406