DocumentCode
3124422
Title
Effects of lithographic roughness and sidewall slope on the optical performance of polymer rectangular waveguides: Modeling
Author
Riege, N. ; Middlebrook, C. ; Buller, W. ; Roggemann, M.
Author_Institution
Michigan Technol. Univ., Houghton, MI, USA
fYear
2010
fDate
21-23 Sept. 2010
Firstpage
35
Lastpage
36
Abstract
In this paper, sidewall slope and sidewall roughness of multimode polymer waveguides have been investigated using modeling and simulation techniques in order to determine fabrication tolerances and their impact on the overall optical system link budget. These tolerances can be used in the manufacturing process to determine where more time intensive and costly fabrication techniques must be utilized.
Keywords
lithography; optical fabrication; optical polymers; optical waveguide theory; 3D beam propagation method; lithographic roughness; multimode polymer rectangular waveguides; optical fabrication; optical performance; surface roughness; Mathematical model; Optical device fabrication; Optical waveguides; Polymers; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Avionics Fiber-Optics and Photonics Technology Conference (AVFOP), 2010 IEEE
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-5312-2
Electronic_ISBN
978-1-4244-5313-9
Type
conf
DOI
10.1109/AVFOP.2010.5637743
Filename
5637743
Link To Document