DocumentCode
3124573
Title
Mechanical properties of LIGA-deposited nickel for MEMS transducers
Author
Sharpe, William N., Jr. ; LaVan, David A. ; Edwards, Richard L.
Author_Institution
Dept. of Mech. Eng., Johns Hopkins Univ., Baltimore, MD, USA
Volume
1
fYear
1997
fDate
16-19 Jun 1997
Firstpage
607
Abstract
This paper presents a new technique for measuring the stress-strain curve of nickel produced by the LIGA method. The results of nine tests on 200 μm thick specimens produced on the 3rd LIGAMUMPS run show a Young´s modulus similar to that of pure nickel, but strengths that are considerably higher
Keywords
Young´s modulus; elastic moduli measurement; mechanical variables measurement; microsensors; nickel; stress-strain relations; tensile strength; tensile testing; yield strength; 200 mum; LIGA-deposited Ni; LIGAMUMPS; MEMS transducers; Ni; Young´s modulus; dog biscuit shaped specimens; mechanical properties; stress-strain curve measurement; tests; ultimate strength; yield strength; Mechanical factors; Mechanical variables measurement; Micromachining; Micromechanical devices; Nickel; Strain measurement; Stress measurement; Testing; Transducers; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.613724
Filename
613724
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