Title :
Fast filtering technique for HREM image analysis
Author :
Guedj, C. ; Vasiliu, M.C.
Author_Institution :
Alcatel Alsthom Recherche, Marcoussis, France
Abstract :
An original method for filtering high resolution transmission electron microscopy images is proposed. An original 2D convolution is applied. It removes parasitic noise and long range contrast fluctuations, and allows local intensity renormalisation in one single pass. Examples are given for a HREM micrograph of a Si0.775Ge 0.1C0.125 layer epitaxially grown on Si(001) and synthetic images. This filtering method is compared with conventional FFT filtering methods. Our technique is more precise, faster and independent on image rotation
Keywords :
Ge-Si alloys; convolution; image resolution; interference suppression; physics computing; semiconductor epitaxial layers; semiconductor materials; transmission electron microscopy; two-dimensional digital filters; 2D convolution; HREM image analysis; HREM micrograph; Si; Si/sub 0.775/Ge/sub 0.1/C/sub 0.125/ layer; SiGeC; fast filtering technique; high resolution transmission electron microscopy images; image rotation; local intensity renormalisation; long range contrast fluctuations; parasitic noise; Atomic measurements; Convolution; Crystallization; Diffraction; Electrons; Filtering; Fluctuations; Fourier transforms; Image analysis; Kernel;
Conference_Titel :
Digital Signal Processing Proceedings, 1997. DSP 97., 1997 13th International Conference on
Conference_Location :
Santorini, Greece
Print_ISBN :
0-7803-4137-6
DOI :
10.1109/ICDSP.1997.628407
