Title :
Low-K cu damascene interconnection leakage and process induced damage assessment
Author_Institution :
Spider Systems
Keywords :
Integrated circuit interconnections; Integrated circuit synthesis; Integrated circuit technology; Production systems;
Conference_Titel :
Integrated Circuit Design and Technology, 2004. ICICDT '04. International Conference on
Print_ISBN :
0-7803-8528-4
DOI :
10.1109/ICICDT.2004.1309966
