DocumentCode

3124906

Title

Low-K cu damascene interconnection leakage and process induced damage assessment

Author

Aum, Paul

Author_Institution

Spider Systems

fYear

2004

fDate

2004

Firstpage

295

Lastpage

295

Keywords

Integrated circuit interconnections; Integrated circuit synthesis; Integrated circuit technology; Production systems;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Circuit Design and Technology, 2004. ICICDT '04. International Conference on

Print_ISBN

0-7803-8528-4

Type

conf

DOI

10.1109/ICICDT.2004.1309966

Filename

1309966