• DocumentCode
    3124973
  • Title

    Silicon micro machined hermetic packaging technology for optical subassemblies

  • Author

    Kilian, Arnd ; Hauffe, Ralf ; Winter, Marcus ; Runge, Patrick ; Kuhmann, Jochen ; Greisen, Christoffer Graae ; Weichel, Steen ; Shiv, Lior ; Heschel, Matthias

  • Author_Institution
    Hymite GmbH, Berlin
  • fYear
    2006
  • fDate
    Oct. 2006
  • Firstpage
    102
  • Lastpage
    103
  • Abstract
    A novel technology for building hermetic optical subassemblies based on silicon is presented which supports precision alignment features, integration of passives, outstanding RF-performance and waferscale assembly and testing. Examples of OSAs will be shown
  • Keywords
    micro-optomechanical devices; microassembling; micromachining; silicon; surface mount technology; wafer level packaging; SMD mountable package; Si; integrated BIAS feed; optical subassemblies; silicon micro machined hermetic packaging technology; waferscale assembly; waferscale testing; Assembly; Biomedical optical imaging; Electronic packaging thermal management; Optical control; Packaging machines; Silicon; Testing; Thermal conductivity; Tin; Wafer bonding;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
  • Conference_Location
    Montreal, Que.
  • Print_ISBN
    0-7803-9555-7
  • Electronic_ISBN
    0-7803-9555-7
  • Type

    conf

  • DOI
    10.1109/LEOS.2006.278876
  • Filename
    4054076