DocumentCode :
3125133
Title :
Microfabricated inductive linear micro positioning sensor
Author :
Dinulovic, Dragan ; Gatzen, Hans H.
Author_Institution :
Inst. for Microtechnology, Hanover Univ., Garbsen, Germany
fYear :
2004
fDate :
24-27 Oct. 2004
Firstpage :
1399
Abstract :
The inductance of an inductive device with a moving core changes as a function of the core position. By extending this principle to a microtransformer with multiple, evenly spaced cores, a measurement system combining features of analog (variable reluctance) and incremental positioning may be devised. For detecting the direction of motion (to know in which direction to count), an incremental length measurement system requires not just one, but two output signals, which have to be offset by 90 degrees. The paper presents a microtransformer based positioning system fulfilling these requirements. It presents the fabrication technology employed and discusses experimental test results.
Keywords :
electric sensing devices; micromachining; microsensors; position measurement; transformer cores; transformers; analog positioning; core position; incremental positioning; inductance; measurement system; microfabricated inductive linear micro positioning sensor; microtransformer; multiple cores; output signals; variable reluctance; Coils; Inductance; Magnetic cores; Magnetic flux; Magnetic sensors; Pollution measurement; Position measurement; Sensor phenomena and characterization; Stator cores; Thin film sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
Type :
conf
DOI :
10.1109/ICSENS.2004.1426446
Filename :
1426446
Link To Document :
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