Title :
Wafer bonded silicon photonics
Author :
Liang, Di ; Fang, Alexander W. ; Chen, Hui-Wen ; Bowers, John E.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of California, Santa Barbara, CA
fDate :
Sept. 30 2008-Oct. 2 2008
Abstract :
Compound semiconductors-silicon integration has never been of such great demand until the recent difficulty to maintain Moore´s law in the microelectronics industry. Recently, we have developed a hybrid silicon evanescent platform (HSEP), which enables the coherent marriage of incompatible characteristics of III-V and silicon, i.e., direct bandgap and high mobility at III-V side and mature CMOS manufacturability and low-optical loss at silicon side. A series of critical components including lasers, amplifiers, photodetectors, and modulators have been successfully implemented in this platform.
Keywords :
CMOS integrated circuits; III-V semiconductors; amplifiers; integrated optics; lasers; photodetectors; wafer bonding; CMOS manufacturability; Moore law; amplifiers; hybrid silicon evanescent platform; lasers; low-optical loss; microelectronics industry; modulators; photodetectors; wafer bonded silicon photonics; Annealing; Distributed feedback devices; Erbium; III-V semiconductor materials; Laser feedback; Photodetectors; Photonics; Silicon; Substrates; Wafer bonding;
Conference_Titel :
Avionics, Fiber-Optics and Photonics Technology Conference, 2008 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4244-1919-7
Electronic_ISBN :
978-1-4244-1920-3
DOI :
10.1109/AVFOP.2008.4653168