Title :
Fault simulation for MEMS
Author :
Rosing, R. ; Richardson, A. ; Dorey, A. ; Peyton, A.
Author_Institution :
Microelectron. Res. Group, Lancaster Univ., UK
Abstract :
Integrated test technology is becoming critically important for MEMS due to the high reliability and safety critical applications targeted. High quality levels in production require efficient test strategies that are properly validated. Fault simulation and testability analysis are critical utilities required to support this process. This paper will discuss methods for achieving test support based on the extension of tools and techniques currently being introduced into the mixed signal ASIC market
Keywords :
micromechanical devices; BIST; MEMS; behavioural modelling; failure mode analysis; fault modelling; fault simulation; integrated test technology; lumped modelling; mechatronic interfaces; test support; testability analysis;
Conference_Titel :
Intelligent and Self-Validating Sensors (Ref. No. 1999/160), IEE Colloquium on
Conference_Location :
Oxford
DOI :
10.1049/ic:19990767
