Nonlinear model reduction for simulation and control of rapid thermal processing

Author

Aling, Henk ; Banerjee, Suman ; Bangia, Anil K. ; Cole, Vernon ; Ebert, Jon ; Emami-Naeini, Abbas ; Jensen, Klavs F. ; Kevrekidis, Ioannis G. ; Shvartsman, Stanislav

Author_Institution

Integrated Syst. Inc., MIT, Cambridge, MA, USA

Volume

4

fYear

1997

fDate

4-6 Jun 1997

Firstpage

2233

Abstract

A methodology (based on the proper orthogonal decomposition and approximate inertial manifolds) is proposed for obtaining low order dynamic models of rapid thermal processing (RTP) systems. These nonlinear models are designed to retain the physical understanding of the RTP system dynamics and their dependence on critical parameters, making them an attractive choice for use in developing more advanced and intelligent controllers

Keywords

electronics industry; nonlinear control systems; process control; rapid thermal processing; reduced order systems; RTP; inertial manifolds; low-order dynamic models; nonlinear model reduction; proper orthogonal decomposition; rapid thermal processing control; simulation; Chemical engineering; Equations; Heating; Nonlinear control systems; Nonlinear dynamical systems; Rapid thermal processing; Reduced order systems; Semiconductor device modeling; Temperature; Thermal engineering;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 1997. Proceedings of the 1997

Conference_Location

Albuquerque, NM

ISSN

0743-1619

Print_ISBN

0-7803-3832-4

Type

conf

DOI

10.1109/ACC.1997.608956

Filename

608956