Title :
On-line extraction for thermal conductivity of surface-micromachined polysilicon thin films
Author :
Xu, Gaobin ; Huang, Qing-An
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
A new test structure for extracting thermal conductivity of polysilicon thin films fabricated by surface-micromachining process is presented. The measurement method and thermal modeling are given, and the results are confirmed by ANSYS™, The test structure can meet the requirements of on-line determination for the thermal conductivity of polysilicon thin films.
Keywords :
micromachining; microsensors; thermal conductivity measurement; thin films; ANSYS; on-line extraction; surface-micromachined polysilicon thin films; surface-micromachining; test structure; thermal conductivity; thermal modeling; Conductivity measurement; Electrothermal effects; Heat transfer; Heating; Micromechanical devices; Temperature; Testing; Thermal conductivity; Thin film devices; Transistors;
Conference_Titel :
Sensors, 2004. Proceedings of IEEE
Print_ISBN :
0-7803-8692-2
DOI :
10.1109/ICSENS.2004.1426496
