Fabrication and Optical Characterization of Ge33As12Se55 (AMTIR-1) Thin Film Waveguides

Author

Choi, D.Y. ; Madden, Steve ; Rode, Andrei ; Wang, Rongping ; Luther-Davies, Barry

Author_Institution

Centre for Ultra-high Bandwidth Devices & Opt. Syst., Australian Nat. Univ., Canberra, ACT

fYear

2006

fDate

Oct. 2006

Firstpage

318

Lastpage

319

Abstract

We present the fabrication process development and the optical characterisation of Ge33As12Se55 rib waveguides. Their low propagation losses (0.27 dB/cm at 1550 nm, the lowest ever reported) strongly support their application in planar integrated nonlinear optic devices.

Keywords

arsenic compounds; etching; germanium compounds; integrated optics; nonlinear optics; optical fabrication; optical films; optical glass; optical losses; optical waveguides; plasma materials processing; pulsed laser deposition; rib waveguides; 1550 nm; AMTIR-1; Ge₃₃As₁₂Se₅₅; optical characterization; planar integrated nonlinear optic devices; plasma etching; plasma patterning processes; propagation losses; rib waveguides; thin film waveguide fabrication; ultra-fast pulsed laser deposition; Etching; Glass; Nonlinear optics; Optical device fabrication; Optical devices; Optical films; Optical waveguides; Plasma applications; Plasma waves; Propagation losses;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE

Conference_Location

Montreal, QC, Canada

Print_ISBN

0-7803-9555-7

Electronic_ISBN

0-7803-9555-7

Type

conf

DOI

10.1109/LEOS.2006.279094

Filename

4054185