• DocumentCode
    3127436
  • Title

    1 Ã\x97 2 and 1 Ã\x97 3 Multimode Interference Couplers Fabricated by Hot Embossing and DUV-induced Modification of Polymers

  • Author

    Bruendel, Mathias ; Rabus, Dominik G.

  • Author_Institution
    Inst. for Microstruct. Technol., Forschungszentrum Karlsruhe GmbH
  • fYear
    2006
  • fDate
    Oct. 2006
  • Firstpage
    326
  • Lastpage
    327
  • Abstract
    We present 1 × 2 and 1 × 3 multimode interference couplers (MMI) for the 1.5 ¿m wavelength region fabricated by hot embossing and deep UV modification of the used polymer.
  • Keywords
    embossing; hot working; integrated optics; optical couplers; optical fabrication; optical polymers; ultraviolet lithography; 1.5 micron; DUV; deep UV lithography; hot embossing; multimode interference couplers fabrication; polymer modification; Couplers; Embossing; Interference; Manufacturing processes; Microstructure; Optical devices; Optical polymers; Optical surface waves; Optical waveguides; Refractive index;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
  • Conference_Location
    Montreal, QC, Canada
  • Print_ISBN
    0-7803-9555-7
  • Electronic_ISBN
    0-7803-9555-7
  • Type

    conf

  • DOI
    10.1109/LEOS.2006.279098
  • Filename
    4054189
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3127436