Title :
1 Ã\x97 2 and 1 Ã\x97 3 Multimode Interference Couplers Fabricated by Hot Embossing and DUV-induced Modification of Polymers
Author :
Bruendel, Mathias ; Rabus, Dominik G.
Author_Institution :
Inst. for Microstruct. Technol., Forschungszentrum Karlsruhe GmbH
Abstract :
We present 1 × 2 and 1 × 3 multimode interference couplers (MMI) for the 1.5 ¿m wavelength region fabricated by hot embossing and deep UV modification of the used polymer.
Keywords :
embossing; hot working; integrated optics; optical couplers; optical fabrication; optical polymers; ultraviolet lithography; 1.5 micron; DUV; deep UV lithography; hot embossing; multimode interference couplers fabrication; polymer modification; Couplers; Embossing; Interference; Manufacturing processes; Microstructure; Optical devices; Optical polymers; Optical surface waves; Optical waveguides; Refractive index;
Conference_Titel :
Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Conference_Location :
Montreal, QC, Canada
Print_ISBN :
0-7803-9555-7
Electronic_ISBN :
0-7803-9555-7
DOI :
10.1109/LEOS.2006.279098
