Title :
Performance limits for distance and thickness estimation in an ultrasonic parameter identification problem
Author :
Dankoski, P. ; Jones, V.K. ; Franklin, G.F.
Author_Institution :
Stanford Univ., CA, USA
Abstract :
This paper explores the limits of performance for the estimation of two parameters simultaneously in an ultrasonic sensing application. The two parameters are the transmitter-receiver distance and the thickness of a plate through which the wave is travelling. The Cramer-Rao lower bound is applied to yield bounds on the variance of unbiased estimates. Since the bound depends upon the input signal, convex optimization can be used to determine the tightest lower bound over all allowable input signals
Keywords :
acoustic signal processing; optimisation; parameter estimation; thickness measurement; ultrasonic applications; ultrasonic propagation; Cramer-Rao bound; convex optimization; frequency response; identification; lower bound; parameter estimation; performance limit; plate thickness measurement; signal processing; transmitter-receiver distance; ultrasonic applications; wave propagation; Delay effects; Delay estimation; Parameter estimation; Planarization; Semiconductor device noise; Semiconductor thin films; Thickness measurement; Time measurement; Ultrasonic variables measurement; Yield estimation;
Conference_Titel :
American Control Conference, 1997. Proceedings of the 1997
Conference_Location :
Albuquerque, NM
Print_ISBN :
0-7803-3832-4
DOI :
10.1109/ACC.1997.609686