Title :
Laser customization by direct writing of aluminum interconnects
Author :
Cacouris, T. ; Krchnavek, R.R. ; Scelsi, G. ; Scarmozzino, R. ; Osgood, R.M., Jr.
Author_Institution :
Microelectron. Sci. Lab., Columbia Univ., New York, NY, USA
Abstract :
The authors present a recently developed technique for direct writing of high-quality aluminium conductors for the purposes of prototyping and customizing integrated circuits. This laser-driven process is a one-step technique to accomplish the customizing metallization step that avoids the use of conventional lithography and allows for rapid turnaround of small quantities of semicustom ICs. This is demonstrated by wiring a CMOS gate-array using this technique and comparing it to the more common laser technique of ablating preexisting interconnects. The process thus provides a complement to laser ablation and allows for greater flexibility in customization
Keywords :
CMOS integrated circuits; aluminium; cellular arrays; chemical vapour deposition; laser beam applications; metallisation; photolysis; Al interconnection; Al metallisation; CMOS gate-array; customizing metallization step; laser direct write Al conductors; laser-driven process; one-step technique; prototyping; rapid turnaround; semicustom ICs; small quantities; Aluminum; Conductivity; Gas lasers; Integrated circuit interconnections; Laser ablation; Laser beams; Laser theory; Optical design; Wiring; Writing;
Conference_Titel :
Custom Integrated Circuits Conference, 1988., Proceedings of the IEEE 1988
Conference_Location :
Rochester, NY
DOI :
10.1109/CICC.1988.20916