Title :
The Automated ASIC Mini-fab: An Approach To Small-lot ASIC Express Computer-aided Design And Production
Author :
Berg, I. ; Garyainov, S. ; Gabsaliamov, A. ; Lurie, M. ; Morozov, E. ; Pialyshev, E. ; Sheidin, Z.
Author_Institution :
Perspective Research Institute "Nauchny Center"
Keywords :
Application specific integrated circuits; Automatic control; Design automation; Inductors; Lithography; Modular construction; Optical sensors; Plasma temperature; Production; Very large scale integration;
Conference_Titel :
Solid-State Circuits Conference, 1991. Digest of Technical Papers. 38th ISSCC., 1991 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-87942-644-6
DOI :
10.1109/ISSCC.1991.689139
