Title :
Polymeric integrated circuits: fabrication and first characterisation
Author :
de Leeuw, D.M. ; Gelinck, G.H. ; Geuns, T.C.T. ; van Veenendaal, E. ; Cantatore, E. ; Huisman, B.H.
Author_Institution :
Philips Res. Lab., Eindhoven, Netherlands
Abstract :
A technology to fabricate polymeric integrated circuits on 150-mm foils is presented. The technology is demonstrated with functional code generators. The integration level is about 700 transistors. The yield of the circuits has been measured as function of the complexity and has been correlated with intrinsic noise margin of the logic gates.
Keywords :
foils; integrated circuit noise; integrated circuit technology; integrated circuit yield; polymers; 150 mm; circuit complexity; circuit yield; fabrication technology; functional code generator; intrinsic noise margin; logic gate; polymer foil; polymeric integrated circuit; Electrodes; FETs; Fabrication; Gold; Integrated circuit technology; Integrated circuit yield; Laboratories; Pentacene; Polymers; Voltage;
Conference_Titel :
Electron Devices Meeting, 2002. IEDM '02. International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7462-2
DOI :
10.1109/IEDM.2002.1175836
