Title :
Thermal distribution during destructive pulses in ESD protection devices using a single-shot, two-dimensional interferometric method
Author :
Pogany, D. ; Bychikhin, S. ; Kuzmik, J. ; Dubec, V. ; Jensen, N. ; Denison, M. ; Groos, G. ; Stecher, M. ; Gornik, E.
Author_Institution :
Inst. for Solid State Electron., Vienna Univ. of Technol., Austria
Abstract :
Thermal distribution during single destructive electrostatic discharge (ESD) events is investigated in smart power ESD protection devices using a novel two-dimensional holographic interferometry technique. The hot spot dynamics and position of destructive current filaments is correlated with the thermal distribution under the non-destructive conditions and with the failure analysis results.
Keywords :
electrostatic discharge; failure analysis; holographic interferometry; power bipolar transistors; power semiconductor diodes; protection; semiconductor device reliability; temperature distribution; thyristors; 2D imaging technique; Michelson-like interferometer; SCR ESD PDs; avalanche regime diode structure; destructive current filaments; destructive pulses; diode ESD PDs; failure analysis; hot spot dynamics; nondestructive conditions; npn ESD PDs; second breakdown; silicon controlled rectifier; single destructive electrostatic discharge events; single-shot two-dimensional interferometric method; smart power ESD protection devices; thermal distribution; two-dimensional holographic interferometry; Diodes; Electrostatic discharge; Electrostatic interference; Holography; Interferometry; Laser beams; Optical pulses; Probes; Protection; Thyristors;
Conference_Titel :
Electron Devices Meeting, 2002. IEDM '02. International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7462-2
DOI :
10.1109/IEDM.2002.1175849
