DocumentCode
3129461
Title
Piezoelectric flow control system based on microfluidic chip
Author
Hu, Xiaoming ; Li, Jingfang ; Li, Qin
Author_Institution
Dept. of Biomed. Eng., Beijing Inst. of Technol., Beijing, China
fYear
2012
fDate
5-8 Aug. 2012
Firstpage
1468
Lastpage
1472
Abstract
We demonstrated an integrated piezoelectric flow control system combined with microfabrication technology and piezoelectric actuation. In this system, the microchip is made of PDMS using soft lithography and standard replica molding techniques. Incorporated with piezoelectric actuator, the device achieve the automatic flow control with low voltage varying from 10V to 30V at adjustable frequency ranging from 1 Hz to 1 kHz.
Keywords
flow control; microfabrication; microfluidics; moulding; piezoelectric actuators; replica techniques; soft lithography; PDMS; automatic flow control; frequency 1 Hz to 1 kHz; microfabrication technology; microfluidic chip; piezoelectric actuation; piezoelectric actuator; piezoelectric flow control system; soft lithography; standard replica molding techniques; Ceramics; Electric fields; Equations; Mathematical model; Microfluidics; Sorting; Flow control; Microfluidic chips; Piezoelectric ceramic;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation (ICMA), 2012 International Conference on
Conference_Location
Chengdu
Print_ISBN
978-1-4673-1275-2
Type
conf
DOI
10.1109/ICMA.2012.6284353
Filename
6284353
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