DocumentCode
3129890
Title
Stacking of known good rebuilt wafers without TSV applications to SiP /abandoned sensors
Author
Val, Christian ; Couderc, Pascal ; Lartigues, Pierre
Author_Institution
3D PLUS, Buc, France
fYear
2009
fDate
21-23 Oct. 2009
Firstpage
178
Lastpage
181
Abstract
Miniaturisation for commercial applications demands very high interconnection densities and low costs. Wiser for former experiences, multi-chip modules, wafer scale integration, 3-D modules for Space, Defense and professional (3D Plus) applications, we learned that the yield constituted an important part of the production costs. The WDoD process allows to stack known good rebuilt wafer (KGRW) only. Several applications in the Medical and industrial domains have been presented. This extremely important densification of 10 to 20 levels per mm with only 100 ¿m around the largest die allows to launch extremely ambitious applications with memories, systems in package and abandoned sensors.
Keywords
multichip modules; system-in-package; 3D Plus applications; TSV applications; interconnection densities; known good rebuilt wafer; Stacking; Through-silicon vias;
fLanguage
English
Publisher
ieee
Conference_Titel
Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009. IMPACT 2009. 4th International
Conference_Location
Taipei
Print_ISBN
978-1-4244-4341-3
Electronic_ISBN
978-1-4244-4342-0
Type
conf
DOI
10.1109/IMPACT.2009.5382148
Filename
5382148
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