• DocumentCode
    3129890
  • Title

    Stacking of known good rebuilt wafers without TSV applications to SiP /abandoned sensors

  • Author

    Val, Christian ; Couderc, Pascal ; Lartigues, Pierre

  • Author_Institution
    3D PLUS, Buc, France
  • fYear
    2009
  • fDate
    21-23 Oct. 2009
  • Firstpage
    178
  • Lastpage
    181
  • Abstract
    Miniaturisation for commercial applications demands very high interconnection densities and low costs. Wiser for former experiences, multi-chip modules, wafer scale integration, 3-D modules for Space, Defense and professional (3D Plus) applications, we learned that the yield constituted an important part of the production costs. The WDoD process allows to stack known good rebuilt wafer (KGRW) only. Several applications in the Medical and industrial domains have been presented. This extremely important densification of 10 to 20 levels per mm with only 100 ¿m around the largest die allows to launch extremely ambitious applications with memories, systems in package and abandoned sensors.
  • Keywords
    multichip modules; system-in-package; 3D Plus applications; TSV applications; interconnection densities; known good rebuilt wafer; Stacking; Through-silicon vias;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009. IMPACT 2009. 4th International
  • Conference_Location
    Taipei
  • Print_ISBN
    978-1-4244-4341-3
  • Electronic_ISBN
    978-1-4244-4342-0
  • Type

    conf

  • DOI
    10.1109/IMPACT.2009.5382148
  • Filename
    5382148