Pneumatic Three-axis Vibration Isolation System Using Negative Stiffness

A three-axis active vibration isolation system with pneumatic actuators for generating negative stiffness was developed A control method of realizing a suspension with negative stiffness by the actuator was derived. It was implemented in the developed system where each actuator was controlled locally. It was demonstrated experimentally that the equalization of the amplitude of negative and positive stiffness enables the system to have zero compliance to direct disturbance.