Title :
A CMOS-MEMS single-chip dual-axis gyroscope
Author :
Lai, Shih-Wei ; Kiang, Jean-Fu
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
In this work, a dual-axis gyroscope is designed and implemented using TSMC 0.18¿m 1P6M process. On-chip capacitive readout circuit is also designed to transform the capacitance deviation to a voltage. The designs of mechanical and electrical parts are presented in the next two sections, followed by simulation results.
Keywords :
CMOS integrated circuits; gyroscopes; microsensors; readout electronics; CMOS-MEMS; dual-axis gyroscope; on-chip capacitive readout circuit; Gyroscopes;
Conference_Titel :
Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009. IMPACT 2009. 4th International
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-4341-3
Electronic_ISBN :
978-1-4244-4342-0
DOI :
10.1109/IMPACT.2009.5382177
