DocumentCode :
3130584
Title :
Three-axis accelerometer in CMOS MEMS
Author :
Kuo, Tsung-Chi ; Kiang, Jean-Fu
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear :
2009
fDate :
21-23 Oct. 2009
Firstpage :
312
Lastpage :
314
Abstract :
A three-axis accelerometer is designed and implemented using TSMC 0.18¿m 1P6M CMOS MEMS process. A low-power low-noise chopper-stabilized amplifier is also designed to reduce the flicker noise.
Keywords :
CMOS integrated circuits; accelerometers; flicker noise; low noise amplifiers; low-power electronics; micromechanical devices; TSMC 1P6M CMOS MEMS process; chopper stabilized amplifier; flicker noise; low noise amplifier; low power amplifier; size 0.18 mum; three-axis accelerometer; Accelerometers; Micromechanical devices;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009. IMPACT 2009. 4th International
Conference_Location :
Taipei
Print_ISBN :
978-1-4244-4341-3
Electronic_ISBN :
978-1-4244-4342-0
Type :
conf
DOI :
10.1109/IMPACT.2009.5382179
Filename :
5382179
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3130584
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