• DocumentCode
    3130584
  • Title

    Three-axis accelerometer in CMOS MEMS

  • Author

    Kuo, Tsung-Chi ; Kiang, Jean-Fu

  • Author_Institution
    Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
  • fYear
    2009
  • fDate
    21-23 Oct. 2009
  • Firstpage
    312
  • Lastpage
    314
  • Abstract
    A three-axis accelerometer is designed and implemented using TSMC 0.18¿m 1P6M CMOS MEMS process. A low-power low-noise chopper-stabilized amplifier is also designed to reduce the flicker noise.
  • Keywords
    CMOS integrated circuits; accelerometers; flicker noise; low noise amplifiers; low-power electronics; micromechanical devices; TSMC 1P6M CMOS MEMS process; chopper stabilized amplifier; flicker noise; low noise amplifier; low power amplifier; size 0.18 mum; three-axis accelerometer; Accelerometers; Micromechanical devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microsystems, Packaging, Assembly and Circuits Technology Conference, 2009. IMPACT 2009. 4th International
  • Conference_Location
    Taipei
  • Print_ISBN
    978-1-4244-4341-3
  • Electronic_ISBN
    978-1-4244-4342-0
  • Type

    conf

  • DOI
    10.1109/IMPACT.2009.5382179
  • Filename
    5382179
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3130584