Fabrication and Characterization of a Vacuum Encapsulated Curved Beam Switch for Harsh Environment Application

A vacuum-encapsulated silicon switch with a curved electrode is characterized for operation in harsh environments. An ultraclean vacuum encapsulation process (episeal) seals the switch after release, providing a pristine operating environment for switching operations. In these devices, the curved beam of the actuator enhances the overdrive voltage tolerance to be more than 100 V. The ON/OFF cycle tests were carried out up to 10⁵ cycles at room temperature, and at least 10⁴ cycles under an elevated temperature of 300°C. Throughout the 300°C tests, an average contact resistance of ~ 28 kΩ is measured, demonstrating the stability of the contact. Finally, high speed pulse I-V monitoring unit was used to observe 13-μs switching speed.