Title :
Imaging Sub-micron Scale Light Confinement in Silicon Waveguides with Apertureless Transmission-based Near-field Scanning Optical Microscopy
Author :
Robinson, Jacob T. ; Preble, Stefan F. ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY
Abstract :
We measure transverse optical decay lengths on the order of ¿/30 in sub-micron scale silicon waveguides using Transmission-based Near-field Scanning Optical Microscopy (TraNSOM), and compare these measurements to theory.
Keywords :
integrated optics; near-field scanning optical microscopy; optical variables measurement; optical waveguides; silicon; Si; apertureless transmission-based near-field scanning optical microscopy; silicon waveguides; sub-micron scale light confinement imaging; transverse optical decay length measurement; Optical imaging; Optical interferometry; Optical microscopy; Optical mixing; Optical scattering; Optical surface waves; Optical waveguides; Probes; Silicon; Tellurium;
Conference_Titel :
Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Conference_Location :
Montreal, QC, Canada
Print_ISBN :
0-7803-9555-7
Electronic_ISBN :
0-7803-9555-7
DOI :
10.1109/LEOS.2006.278902
