Benchmarking of commercial software for fault detection and classification (FDC) of plasma etchers for semiconductor manufacturing equipment

Author

Bakshi, Vivek

Author_Institution

SEMATECH, Austin, TX, USA

Volume

3

fYear

1997

fDate

4-6 Jun 1997

Firstpage

1579

Abstract

In order to evaluate the performance of a large number of commercial FDC software, we conducted a benchmarking study at SEMATECH. The purpose of this paper is to report the tool data and the procedures that we were successfully able to use to benchmark the FDC software. These procedures can be used to compare FDC software based on similar or different principals. The results from this benchmarking have allowed the SEMATECH member companies to choose the software for beta-testing in the production environment. We conducted the benchmarking, by using the tool data obtained from three SEMATECH member companies, Texas Instruments, MOTOROLA and Lucent Technologies. Tool data was put on a secured FTP site with the instructions for solving the benchmarking problems. The software suppliers downloaded the data, analyzed the data and returned the results within the specified time-limits. The best results indicated that it may be possible to predict the tool faults in advance

Keywords

electronics industry; fault diagnosis; integrated circuit manufacture; manufacturing data processing; software performance evaluation; sputter etching; Lucent Technologies; MOTOROLA; SEMATECH; Texas Instruments; benchmark tests; fault classification; fault detection; fault diagnosis software; plasma etchers; semiconductor manufacturing equipment; Continuous production; Etching; Fault detection; Fault diagnosis; Plasma applications; Plasma materials processing; Production systems; Semiconductor device manufacture; Software performance; Software tools;

fLanguage

English

Publisher

ieee

Conference_Titel

American Control Conference, 1997. Proceedings of the 1997

Conference_Location

Albuquerque, NM

ISSN

0743-1619

Print_ISBN

0-7803-3832-4

Type

conf

DOI

10.1109/ACC.1997.610849

Filename

610849