• DocumentCode
    3131665
  • Title

    Quantifying operational time variability: the missing parameter for cycle time reduction

  • Author

    Jacobs, J.H. ; Etman, L.F.P. ; Rooda, J.E. ; Van Campen, E.J.J.

  • Author_Institution
    Syst. Eng. Group, Eindhoven Univ. of Technol., Netherlands
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    1
  • Lastpage
    10
  • Abstract
    Operational time variability is one of the key parameters determining the average cycle time of lots. Many different sources of variability can be identified such as equipment breakdowns, set-up, and operator availability. However, an appropriate measure to quantify variability is missing. Measures such as the overall equipment efficiency (OEE) in the semiconductor industry are entirely based on mean value analysis and do not include variances. The main contribution of this paper is the development of a new algorithm that enables estimation of the mean effective process time te and the coefficient of variation ce2 of a multiple machine equipment family from real fab data. The algorithm formalizes the effective process time definitions as given by Hopp and Spearman (2000), and Sattler (1996). The algorithm quantifies the claims of machine capacity by lots, which includes time losses due to down time, set-up time, or other irregularities. The estimated te and ce 2 values can be interpreted in accordance with the well-known G/G/m queueing relations. A test example as well as an elaborate case from the semiconductor industry show the potential of the new effective process time (EPT) algorithm for cycle time reduction programs
  • Keywords
    integrated circuit manufacture; manufacturing resources planning; production control; queueing theory; semiconductor process modelling; G/G/m queueing relations; average lot cycle time; coefficient of variation; cycle time reduction; cycle time reduction programs; down time; effective process time algorithm; effective process time definitions; equipment breakdowns; equipment set-up; machine capacity; mean effective process time; mean value analysis; multiple machine equipment family; operational time variability; operational time variability quantification; operator availability; overall equipment efficiency; semiconductor industry; set-up time; time losses; variability sources; variances; Analysis of variance; Conductors; Electric breakdown; Electronics industry; Jacobian matrices; Productivity; Semiconductor device manufacture; Systems engineering and theory; Tellurium; Time measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
  • Conference_Location
    Munich
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-6555-0
  • Type

    conf

  • DOI
    10.1109/ASMC.2001.925605
  • Filename
    925605