Title :
Advancement of MEMS into RF-filter applications
Author :
Aigner, R. ; Ella, J. ; Timme, H.-J. ; Elbrecht, L. ; Nessler, W. ; Marksteiner, S.
Author_Institution :
Wireless Solutions, Infineon Technol., Munich, Germany
Abstract :
RF-MEMS filters will substitute conventional filters in mobile communication under certain technical and commercial conditions. Key performance parameters and requirements are discussed in detail. Two different approaches for RF-MEMS filters are reviewed and compared: Electric field driven MEMS-resonators and piezoelectric MEMS resonators. State-of-the-art RF-MEMS filters based on bulk-acoustic-wave (BAW) resonators are presented.
Keywords :
acoustic resonators; bulk acoustic wave devices; crystal resonators; micromechanical devices; mobile radio; radiofrequency filters; MEMS; RF-filter applications; bulk-acoustic-wave resonators; electric field driven resonators; mobile communication; piezoelectric resonators; Bandwidth; Ceramics; Crystals; Insertion loss; Micromechanical devices; Mobile handsets; Radio frequency; Radiofrequency microelectromechanical systems; Resonator filters; Surface acoustic waves;
Conference_Titel :
Electron Devices Meeting, 2002. IEDM '02. International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7462-2
DOI :
10.1109/IEDM.2002.1175981
