Title :
Capacity analysis tool
Author :
Sisler, Sharon ; Merrill, Edward ; Sorrentino, Phillip
Author_Institution :
Microelectron. Div., IBM Corp., Essex Junction, VT, USA
Abstract :
This paper describes a capacity analysis tool developed to quickly screen potential wafer profiles for a multi-technology, multi-part number, IBM Microelectronics semiconductor fabricator. This tool identifies constraints and opportunities within the fabricator, as well as capacity shortages of key tool sets for a given wafer load. Quicker capacity analysis was demanded not only by a more dynamic market, but also by new strategies to exclusively manufacture logic and pursue OEM market opportunities
Keywords :
integrated circuit manufacture; integrated logic circuits; manufacturing resources planning; process monitoring; production control; OEM market opportunities; capacity analysis tool; capacity shortages; dynamic market; logic manufacture; multi-technology multi-part number semiconductor fabricator; potential wafer profile screening; tool sets; wafer load; Etching; Linear programming; Lithography; Logic; Market opportunities; Microelectronics; Rivers; Semiconductor device manufacture; Strips; Throughput;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
Conference_Location :
Munich
Print_ISBN :
0-7803-6555-0
DOI :
10.1109/ASMC.2001.925620
