Capacity analysis tool

Author

Sisler, Sharon ; Merrill, Edward ; Sorrentino, Phillip

Author_Institution

Microelectron. Div., IBM Corp., Essex Junction, VT, USA

fYear

2001

fDate

2001

Firstpage

77

Lastpage

79

Abstract

This paper describes a capacity analysis tool developed to quickly screen potential wafer profiles for a multi-technology, multi-part number, IBM Microelectronics semiconductor fabricator. This tool identifies constraints and opportunities within the fabricator, as well as capacity shortages of key tool sets for a given wafer load. Quicker capacity analysis was demanded not only by a more dynamic market, but also by new strategies to exclusively manufacture logic and pursue OEM market opportunities

Keywords

integrated circuit manufacture; integrated logic circuits; manufacturing resources planning; process monitoring; production control; OEM market opportunities; capacity analysis tool; capacity shortages; dynamic market; logic manufacture; multi-technology multi-part number semiconductor fabricator; potential wafer profile screening; tool sets; wafer load; Etching; Linear programming; Lithography; Logic; Market opportunities; Microelectronics; Rivers; Semiconductor device manufacture; Strips; Throughput;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI

Conference_Location

Munich

ISSN

1078-8743

Print_ISBN

0-7803-6555-0

Type

conf

DOI

10.1109/ASMC.2001.925620

Filename

925620