DocumentCode
3132145
Title
Equipment interface: the implementation heart of APC
Author
Doss, Curtis ; Stewart, Chris
Author_Institution
Adv. Micro Devices Inc., Austin, TX, USA
fYear
2001
fDate
2001
Firstpage
135
Lastpage
138
Abstract
Many articles and presentations about advanced process control (APC) show a simple diagram where fab metrology and process tools are controlled by some APC software. What is missing from this illustration, and usually the accompanying literature, is the mention of one other important piece without which the APC scheme would not work, namely the equipment interface (EI). Trivializing the EI or overlooking its place in APC can be a costly error. The EI is the implementation heart of APC. This paper describes the history of the equipment interface project at AMD and its relationship to APC
Keywords
integrated circuit manufacture; integrated circuit measurement; peripheral interfaces; process control; production testing; AMD equipment interface project; APC; APC implementation; APC scheme; APC software; advanced process control; equipment interface; fab metrology; process tools; Automatic control; Automation; Feedback loop; Heart; History; Metrology; Process control; Production facilities; Semiconductor device manufacture; Software tools;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference, 2001 IEEE/SEMI
Conference_Location
Munich
ISSN
1078-8743
Print_ISBN
0-7803-6555-0
Type
conf
DOI
10.1109/ASMC.2001.925634
Filename
925634
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