A reconfigurable impedance matching network using dual-beam MEMS switches for an extended operating frequency range

A reconfigurable impedance matching network has been developed for a wideband operating frequency. The network is based on a slow-wave distributed MEMS transmission line (DMTL) coupled with a tri-state MEMS capacitive switch to improve the operating frequency range. The proposed design consists of 8 tri-state RF-MEMS switches producing 6561 (3⁸) impedance states. The size of the tunable matching network fabricated on an alumina substrate is very compact (4.4 × 1.9 mm). The measured results demonstrate wide coverage of the Smith chart between 5 GHz to 20 GHz. The transducer gain of the network is better then 1 dB for a wide range of input impedances. The measured results validate the potential of the proposed structure to realize a miniature reconfigurable matching network with a wide impedance coverage over an extended operating frequency range.