DocumentCode
3132748
Title
[Front cover]
fYear
2007
fDate
8-9 June 2007
Firstpage
1
Lastpage
1
Abstract
The following topics are dealt with: advance device/integration; junction modelling/simulation; doping/shallow juntion; silicides/germanides; advanced equipments; impurity atoms activation.
Keywords
impurities; semiconductor devices; semiconductor doping; semiconductor junctions; advance device/integration; advanced equipments; doping; germanides; impurity atoms activation; junction modeling; junction simulation; junction technology; shallow junction; silicides;
fLanguage
English
Publisher
ieee
Conference_Titel
Junction Technology, 2007 International Workshop on
Conference_Location
Kyoto
Print_ISBN
1-4244-1103-3
Type
conf
DOI
10.1109/IWJT.2007.4279929
Filename
4279929
Link To Document