DocumentCode
3132844
Title
Geometry Dependence of Leaky-Mode, Waveguide-Coupled, Polysilicon Photodetectors
Author
Pownall, Bob ; Yuan, Guangwei ; Chen, Tom W. ; Nikkel, Phil ; Lear, Kevin L.
Author_Institution
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
fYear
2006
fDate
Oct. 2006
Firstpage
865
Lastpage
866
Abstract
Characterization of leaky-mode coupled polysilicon MSM photodetectors fabricated in 0.35 mum commercial CMOS with varying contact spacing and length reveals short and narrow devices have responsivity sufficient for optical interconnect applications
Keywords
integrated optoelectronics; metal-semiconductor-metal structures; optical couplers; optical fabrication; optical polymers; photodetectors; semiconductor device measurement; 0.35 micron; CMOS process; MSM photodetector characterization; leaky-mode waveguide-coupled polysilicon photodetectors; optical interconnect applications; photodetector fabrication; CMOS technology; Detectors; Geometry; Optical attenuators; Optical fiber testing; Optical scattering; Optical waveguides; Photoconductivity; Photodetectors; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Conference_Location
Montreal, Que.
Print_ISBN
0-7803-9555-7
Electronic_ISBN
0-7803-9555-7
Type
conf
DOI
10.1109/LEOS.2006.279080
Filename
4054460
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