Title :
Geometry Dependence of Leaky-Mode, Waveguide-Coupled, Polysilicon Photodetectors
Author :
Pownall, Bob ; Yuan, Guangwei ; Chen, Tom W. ; Nikkel, Phil ; Lear, Kevin L.
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
Abstract :
Characterization of leaky-mode coupled polysilicon MSM photodetectors fabricated in 0.35 mum commercial CMOS with varying contact spacing and length reveals short and narrow devices have responsivity sufficient for optical interconnect applications
Keywords :
integrated optoelectronics; metal-semiconductor-metal structures; optical couplers; optical fabrication; optical polymers; photodetectors; semiconductor device measurement; 0.35 micron; CMOS process; MSM photodetector characterization; leaky-mode waveguide-coupled polysilicon photodetectors; optical interconnect applications; photodetector fabrication; CMOS technology; Detectors; Geometry; Optical attenuators; Optical fiber testing; Optical scattering; Optical waveguides; Photoconductivity; Photodetectors; Silicon;
Conference_Titel :
Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Conference_Location :
Montreal, Que.
Print_ISBN :
0-7803-9555-7
Electronic_ISBN :
0-7803-9555-7
DOI :
10.1109/LEOS.2006.279080
