Title :
1998 Symposium on VLSI Technology Digest of Technical Papers [Front Matter]
Abstract :
Presents the front matter from the conference proceedings.
Keywords :
VLSI; integrated circuit technology; Cu interconnect; DRAM; FeRAM; RF MOSFET; SOI; SRAM; VLSI technology; capacitor; deep submicron MOSFET; deep submicron patterning; flash memory; gate dielectric; gate technology; hot carriers; interconnect; reliability; shallow junction; shallow trench isolation; silicide;
Conference_Titel :
VLSI Technology, 1998. Digest of Technical Papers. 1998 Symposium on
Conference_Location :
Honolulu, HI, USA
Print_ISBN :
0-7803-4770-6
DOI :
10.1109/VLSIT.1998.689175
