Title :
TEM evaluation of ordered and modulated structures in GaAsSb crystals grown on (110)InP substrates by molecular beam epitaxy
Author :
Ueda, Osamu ; Nakata, Yoshiaki ; Muto, Shunichi
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
Ordered and modulated structures in GaAsSb grown on (110)InP substrates by molecular beam epitaxy, has been evaluated by transmission electron microscopy. In the electron diffraction pattern from the GaAsSb, superstructure spots associated with CuAu-I type ordered structure are found. When the offset angle of the substrates increases, the ordering becomes stronger. The ordering becomes also stronger with increasing growth temperature in the range 470-530°C. In high resolution images of the crystal, areas with doubling in periodicity of 220 and 200 lattice fringes are observed locally, which is due to CuAu-I type ordering, indicating that the ordering is not perfect and that ordered regions are likely to be microdomains. Modulated structure are also found in both the ⟨001⟩ and ⟨11¯0⟩ directions. Coarse and fine modulated structures are clearly observed, and the periodicity of the coarse structure in the ⟨001⟩ direction is much longer than that in the ⟨11¯0⟩ direction. These findings lead us to conclude that atomic ordering and spinodal decomposition of the crystal are competing on the growth surface via surface diffusion of deposited atoms
Keywords :
III-V semiconductors; electron diffraction; gallium arsenide; gallium compounds; molecular beam epitaxial growth; order-disorder transformations; semiconductor growth; spinodal decomposition; surface diffusion; surface phase transformations; surface structure; transmission electron microscopy; (110)InP substrates; 470 to 530 C; CuAu-I type ordered structure; CuAu-I type ordering; GaAsSb; GaAsSb crystals; InP; TEM; atomic ordering; coarse modulated structures; electron diffraction pattern; fine modulated structures; growth surface; growth temperature; high resolution images; microdomains; modulated structures; molecular beam epitaxy; offset angle; ordered structures; periodicity doubling; spinodal decomposition; superstructure spots; surface diffusion; transmission electron microscopy; Atomic layer deposition; Diffraction; Electron beams; Image resolution; Lattices; Molecular beam epitaxial growth; Optical modulation; Substrates; Temperature distribution; Transmission electron microscopy;
Conference_Titel :
Indium Phosphide and Related Materials, 1995. Conference Proceedings., Seventh International Conference on
Conference_Location :
Hokkaido
Print_ISBN :
0-7803-2147-2
DOI :
10.1109/ICIPRM.1995.522127