DocumentCode :
3133327
Title :
Studies on the influence of Peltier effect and electromigration during LPEE growth of binary and ternary semiconductors
Author :
Fareed, R. S Qhalid ; Dhanasekaran, R.
Author_Institution :
Crystal Growth Centre, Anna Univ., Madras, India
fYear :
1995
fDate :
9-13 May 1995
Firstpage :
273
Lastpage :
274
Abstract :
In the present communication, a model has been developed to understand the growth kinetics of binary and ternary compound semiconductors during liquid phase electroepitaxy (LPEE) growth. The two major factors influencing the growth in this technique are Peltier effect and electromigration. In the present model, a transport equation has been solved numerically by incorporating the Peltier effect and electromigration conditions. The effect of electromigration due to application of electric field has been incorporated in the diffusion equation. Applying the boundary conditions, the new equation has been solved numerically
Keywords :
Boltzmann equation; Peltier effect; electric field effects; electromigration; liquid phase epitaxial growth; semiconductor growth; semiconductor process modelling; semiconductors; ternary semiconductors; LPEE growth; Peltier effect; binary semiconductors; boundary conditions; diffusion equation; electric field; electromigration; growth kinetics; liquid phase electroepitaxy; ternary semiconductors; transport equation; Cooling; Current; Electromigration; Epitaxial layers; Equations; Heating; Indium phosphide; Kinetic theory; Temperature; Thermoelectricity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1995. Conference Proceedings., Seventh International Conference on
Conference_Location :
Hokkaido
Print_ISBN :
0-7803-2147-2
Type :
conf
DOI :
10.1109/ICIPRM.1995.522132
Filename :
522132
Link To Document :
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