Title :
Monte Carlo simulation of electromigration in polycrystalline metal stripes
Author :
Pascoli, S. Di ; Iannaccone, G.
Author_Institution :
Dipt. di Ingegneria dell´´Inf., Pisa Univ., Italy
Abstract :
We have developed a Monte Carlo simulator of the electromigration process in polycrystalline metal stripes. Stripes with different average grain size can be generated with Voronoi tasselation, and mapped on to a network of resistors. The proposed model includes the major role played by grain boundaries and by the current density redistribution within the stripe following void formation. Simulations of stripes with different grain sizes and different widths are shown, and a few expressions for the failure probability are compared on the basis of their capability of reproducing the experimental results. In addition, electromigration noise has been computed, recovering the characteristic 1/fγ (γ≈2) behavior. The substantial qualitative agreement between our calculations and the experimental results is a convincing test of the capability of the model proposed to include the relevant physics
Keywords :
1/f noise; Monte Carlo methods; computational geometry; current density; electromigration; failure analysis; grain boundaries; grain size; integrated circuit interconnections; integrated circuit metallisation; integrated circuit modelling; integrated circuit noise; integrated circuit reliability; probability; Monte Carlo simulation; Monte Carlo simulator; Voronoi tasselation; average grain size; characteristic 1/f noise behavior; current density redistribution; electromigration; electromigration noise; electromigration process; failure probability; grain boundaries; grain size; line width; model; polycrystalline metal stripes; resistor network mapping; stripe simulations; void formation; Circuits; Computational modeling; Current density; Electromigration; Grain boundaries; Grain size; Joining processes; Monte Carlo methods; Resistors; Telecommunications;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium on the
Print_ISBN :
0-7803-5187-8
DOI :
10.1109/IPFA.1999.791304
