DocumentCode :
3133629
Title :
Illumination-sensitive failure mechanism-a case study on transient Icc failure
Author :
Thian, Teh Swee ; Yen, Teoh Wan
Author_Institution :
Adv. Micro Devices Export Sdn Bhd, Penang, Malaysia
fYear :
1999
fDate :
1999
Firstpage :
73
Lastpage :
76
Abstract :
Illumination-sensitive failure in integrated circuits (IC) has generated considerable interest in the failure analysis community, and powerful techniques such as OBIC and LIVA have emerged (Cole et al, 1995; Wills et al, 1990). However, these techniques required the use of a new generation of SOM-based equipment which may be inaccessible to some failure analysis laboratories. This paper presents an alternative to the SOM approach to the study of a illumination-sensitive and transient Icc failure. By using emission microscopy, FIB isolation, and mechanical probing, coupled with an in-depth circuit analysis, the effort leads to a full understanding of the failure mechanism
Keywords :
electric current; failure analysis; focused ion beam technology; integrated circuit reliability; integrated circuit testing; isolation technology; network analysis; optical microscopy; probes; transient analysis; FIB isolation; LIVA; OBIC; SOM-based equipment; circuit analysis; emission microscopy; failure analysis; failure mechanism; illumination-sensitive failure mechanism; illumination-sensitive transient Icc failure; integrated circuits; mechanical probing; transient Icc failure; Circuit analysis; Circuit faults; Circuit testing; Clamps; Computer aided software engineering; Failure analysis; MOS devices; MOSFETs; Microscopy; Transient analysis;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium on the
Print_ISBN :
0-7803-5187-8
Type :
conf
DOI :
10.1109/IPFA.1999.791308
Filename :
791308
Link To Document :
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