• DocumentCode
    3133629
  • Title

    Illumination-sensitive failure mechanism-a case study on transient Icc failure

  • Author

    Thian, Teh Swee ; Yen, Teoh Wan

  • Author_Institution
    Adv. Micro Devices Export Sdn Bhd, Penang, Malaysia
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    73
  • Lastpage
    76
  • Abstract
    Illumination-sensitive failure in integrated circuits (IC) has generated considerable interest in the failure analysis community, and powerful techniques such as OBIC and LIVA have emerged (Cole et al, 1995; Wills et al, 1990). However, these techniques required the use of a new generation of SOM-based equipment which may be inaccessible to some failure analysis laboratories. This paper presents an alternative to the SOM approach to the study of a illumination-sensitive and transient Icc failure. By using emission microscopy, FIB isolation, and mechanical probing, coupled with an in-depth circuit analysis, the effort leads to a full understanding of the failure mechanism
  • Keywords
    electric current; failure analysis; focused ion beam technology; integrated circuit reliability; integrated circuit testing; isolation technology; network analysis; optical microscopy; probes; transient analysis; FIB isolation; LIVA; OBIC; SOM-based equipment; circuit analysis; emission microscopy; failure analysis; failure mechanism; illumination-sensitive failure mechanism; illumination-sensitive transient Icc failure; integrated circuits; mechanical probing; transient Icc failure; Circuit analysis; Circuit faults; Circuit testing; Clamps; Computer aided software engineering; Failure analysis; MOS devices; MOSFETs; Microscopy; Transient analysis;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium on the
  • Print_ISBN
    0-7803-5187-8
  • Type

    conf

  • DOI
    10.1109/IPFA.1999.791308
  • Filename
    791308