Title :
Automatic DRAM cell location in the SEM
Author :
Thong, J.T.L. ; Zhu, Y. ; Phang, J.C.H.
Author_Institution :
Dept. of Electr. Eng., Nat. Univ. of Singapore, Singapore
Abstract :
The highly repetitive nature of a DRAM cell array requires the failure analyst to perform the tedious task of manually counting and tracking cells in order to locate on the die the position of a failed cell that has been identified through electrical testing. This paper describes a vision-based system that automates the task of cell location without the need for a high-accuracy specimen stage. The algorithm makes use of cross-correlation to track a moving die, and mimics the action that would otherwise be carried out by the SEM operator in locating a cell position
Keywords :
DRAM chips; correlation methods; failure analysis; inspection; integrated circuit reliability; integrated circuit testing; position measurement; scanning electron microscopy; DRAM cell array; SEM; SEM operator action; automatic DRAM cell location; cell counting; cell location; cell position; cell tracking; cross-correlation; electrical testing; failed cell position location; failure analysis; high-accuracy specimen stage; moving die tracking; vision-based system; Delay; Failure analysis; Image resolution; Modems; Performance analysis; Performance evaluation; Random access memory; Scanning electron microscopy; Testing; Tracking;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium on the
Print_ISBN :
0-7803-5187-8
DOI :
10.1109/IPFA.1999.791315
