An integrated (automated) photon emission microscope and MOSFET characterisation system for combined microscopic and macroscopic device analysis

Author

Ng, T.H. ; Chim, W.K. ; Chan, D.S.H. ; Phang, J.C.H. ; Liu, Y.Y. ; Lou, C.L. ; Leang, S.E. ; Tao, J.M.

Author_Institution

Centre for Integrated Circuit Failure Analysis & Reliability, Nat. Univ. of Singapore, Singapore

fYear

1999

fDate

1999

Firstpage

113

Lastpage

118

Abstract

This article describes the design and performance of an integrated characterization system for the physical microscopic analysis and macroscopic reliability characterization of MOSFETs under hot-carrier stressing conditions. The system includes the photon emission microscopic localization of the photon emitting device(s), spectroscopic measurement of the emitted light, hot-carrier stressing and lifetime estimation, charge-pumping measurement and profiling, gated-diode measurement, capacitance-voltage measurement and flicker-noise characterization

Keywords

MOSFET; automatic test equipment; capacitance; failure analysis; flicker noise; hot carriers; optical microscopy; semiconductor device noise; semiconductor device reliability; semiconductor device testing; MOSFET characterisation system; MOSFETs; capacitance-voltage measurement; charge-pumping measurement; charge-pumping profiling; combined microscopic/macroscopic device analysis; emitted light; flicker-noise characterization; gated-diode measurement; hot-carrier stressing; integrated automated photon emission microscope; integrated characterization system; lifetime estimation; macroscopic reliability characterization; photon emission microscopic localization; photon emitting device; physical microscopic analysis; spectroscopic measurement; Capacitance measurement; Current measurement; Hot carriers; Life estimation; Lifetime estimation; MOSFET circuits; Microscopy; Performance analysis; Spectroscopy; Stress measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium on the

Print_ISBN

0-7803-5187-8

Type

conf

DOI

10.1109/IPFA.1999.791317

Filename

791317