Title :
An integrated (automated) photon emission microscope and MOSFET characterisation system for combined microscopic and macroscopic device analysis
Author :
Ng, T.H. ; Chim, W.K. ; Chan, D.S.H. ; Phang, J.C.H. ; Liu, Y.Y. ; Lou, C.L. ; Leang, S.E. ; Tao, J.M.
Author_Institution :
Centre for Integrated Circuit Failure Analysis & Reliability, Nat. Univ. of Singapore, Singapore
Abstract :
This article describes the design and performance of an integrated characterization system for the physical microscopic analysis and macroscopic reliability characterization of MOSFETs under hot-carrier stressing conditions. The system includes the photon emission microscopic localization of the photon emitting device(s), spectroscopic measurement of the emitted light, hot-carrier stressing and lifetime estimation, charge-pumping measurement and profiling, gated-diode measurement, capacitance-voltage measurement and flicker-noise characterization
Keywords :
MOSFET; automatic test equipment; capacitance; failure analysis; flicker noise; hot carriers; optical microscopy; semiconductor device noise; semiconductor device reliability; semiconductor device testing; MOSFET characterisation system; MOSFETs; capacitance-voltage measurement; charge-pumping measurement; charge-pumping profiling; combined microscopic/macroscopic device analysis; emitted light; flicker-noise characterization; gated-diode measurement; hot-carrier stressing; integrated automated photon emission microscope; integrated characterization system; lifetime estimation; macroscopic reliability characterization; photon emission microscopic localization; photon emitting device; physical microscopic analysis; spectroscopic measurement; Capacitance measurement; Current measurement; Hot carriers; Life estimation; Lifetime estimation; MOSFET circuits; Microscopy; Performance analysis; Spectroscopy; Stress measurement;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 1999. Proceedings of the 1999 7th International Symposium on the
Print_ISBN :
0-7803-5187-8
DOI :
10.1109/IPFA.1999.791317
