Title :
Adaptive Friction Compensation Design for Submicrometer Positioning of High Precision Stage
Author :
Minh, Truong Ngoc ; Ohishi, Kiyoshi ; Takata, Masasuke ; Hashimoto, Seiji ; Kosaka, Kouji ; Kubota, Hiroshi ; Ohmi, Tadahiro
Author_Institution :
Nagaoka Univ. of Technol., Niigata
Abstract :
This paper presents an adaptive friction compensation algorithm based on LuGre friction model with only measurements of position for a high precision stage using a synchronous piezoelectric device driver (SPIDER). Two observers are used to estimate an unmeasured friction state in LuGre model. Adaptive control laws are derived on the basis of the Lyapunov technique for estimating unknown friction parameters, and compensating friction force. Lyapunov´s direct method is used to prove the robust global convergence of position tracking errors. Experimental results taken from SPIDER system confirm that the proposed control method achieved fine positioning with respect to friction behavior.
Keywords :
Lyapunov methods; adaptive control; compensation; control system synthesis; convergence; feedback; friction; observers; parameter estimation; position control; robust control; LuGre friction model; Lyapunov direct method; SPIDER system; adaptive control laws; adaptive friction compensation algorithm; friction force compensation; high precision stage; observers; position measurements; robust feedback controller design; robust global convergence; submicrometer positioning; synchronous piezoelectric device driver; unknown friction parameter estimation; unmeasured friction state estimation; Adaptive control; Control systems; Convergence; Friction; Observers; Parameter estimation; Piezoelectric devices; Position measurement; Robustness; State estimation;
Conference_Titel :
Mechatronics, ICM2007 4th IEEE International Conference on
Conference_Location :
Kumamoto
Print_ISBN :
1-4244-1183-1
Electronic_ISBN :
1-4244-1184-X
DOI :
10.1109/ICMECH.2007.4280034
