Title :
RF MEMS for high-frequency applications
Author :
Katehi, Linda P B ; Perlman, Barry S.
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
Abstract :
RF MEMS has been identified as an area, which has the potential to provide a major impact on existing system architectures in sensors and communications by reducing weight, cost, size, and power dissipation by a few orders of magnitude. Key MEMS devices for current RF architectures are switches in radar systems and filters in communication systems. This paper discusses a new family of MEMS switches and Si-micromachined circuits appropriate for use in modern communications systems
Keywords :
elemental semiconductors; micromachining; micromechanical devices; microwave circuits; microwave switches; millimetre wave circuits; silicon; HF applications; MEMS switches; RF MEMS; RF architectures; Si; Si-micromachined circuits; communications; high-frequency applications; sensors; system architectures; Communication switching; Costs; Microelectromechanical devices; Power dissipation; Radar; Radio frequency; Radiofrequency identification; Radiofrequency microelectromechanical systems; Sensor systems; Switches;
Conference_Titel :
Microwave Conference, 2000 Asia-Pacific
Conference_Location :
Sydney, NSW
Print_ISBN :
0-7803-6435-X
DOI :
10.1109/APMC.2000.925944
