Title :
Micromachined inertial sensors for vehicles
Author :
Barbour, N. ; Brown, E. ; Connelly, J. ; Dowdle, J. ; Brand, G. ; Nelson, J. ; O´Bannon, J.
Author_Institution :
Charles Stark Draper Lab. Inc., Cambridge, MA, USA
Abstract :
Micromachined silicon sensors offer tremendous cost, size, and reliability improvements for guidance, navigation, and control (GN&C). Currently the development of micro-electromechanical systems (MEMS) inertial sensors is largely supported by DoD; however, it will ultimately be driven by high-volume commercial markets with target prices below $25 per instrument. The paper describes advances in micromechanical gyro and accelerometer design and packaging. Performance of a prototype automotive traction control module, in pilot production, and a planned automobile suspension control module are described. The concept of a 3-cubic-inch, multi-purpose MEMS inertial system, based on a three-gyro, three-accelerometer system under development for a guided artillery shell, is discussed for automotive applications. Plans for future cost and size reduction are presented
Keywords :
CMOS integrated circuits; accelerometers; gyroscopes; inertial navigation; microsensors; mixed analogue-digital integrated circuits; packaging; road vehicles; automobile suspension control module; automotive traction control module; guided artillery shell; micro-electromechanical systems; micromachined inertial sensors; micromachined silicon sensors; micromechanical accelerometer; micromechanical gyro; Accelerometers; Costs; Instruments; Microelectromechanical systems; Micromechanical devices; Navigation; Sensor systems; Silicon; Size control; Vehicles;
Conference_Titel :
Intelligent Transportation System, 1997. ITSC '97., IEEE Conference on
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-4269-0
DOI :
10.1109/ITSC.1997.660620
