Title :
Recent progress on gas sensors based on semiconducting thin films
Author :
Sberveglieri, G. ; Baratto, C. ; Comini, E. ; Faglia, G. ; Nelli, P. ; Dori, L.
Author_Institution :
Brescia Univ., Italy
Abstract :
In this paper we review the electrical properties of semiconducting layers based on metal oxide thin films used for monitoring environmental gases and examine some innovative technique to increase the sensor selectivity towards particular gases (pulsed temperature, use of UV irradiation). The sensing layers are deposited onto a micromachined silicon substrate, which is characterized by low power consumption and allowed the interface with the process electronics
Keywords :
electric sensing devices; gas sensors; semiconductor thin films; UV irradiation; electrical properties; environmental gases; gas sensors; low power consumption; pulsed temperature; semiconducting thin films; sensor selectivity; Gas detectors; Gases; Monitoring; Semiconductivity; Semiconductor thin films; Sensor phenomena and characterization; Silicon; Substrates; Temperature sensors; Thin film sensors;
Conference_Titel :
Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
0-7803-4513-4
DOI :
10.1109/COMMAD.1998.791587
