Accurate closed-form formulas for the electromagnetic parameters of micromachined shielded membrane microstrip line

Author

Benahmed, NasrEddine ; Benabdallah, Nadia ; Bendimerad, Fethi Tarik ; Benyoucef, Boumedienne ; Seghier, Salima

Author_Institution

Lab. de Telecommun. de Tlemcen, Univ. de Tlemcen, Tlemcen, Algeria

fYear

2011

fDate

22-25 March 2011

Firstpage

1

Lastpage

4

Abstract

This article presents analytical expressions for the electromagnetic parameters (characteristic impedance (Z_c), inductance (L] and capacitance (C)) of micromachined shielded membrane microstrip line (SMM). The analytical expressions can be deduced from rigorous analyses using method of moments (MoM) analysis and curve-fitting techniques. An analysis can be readily implemented in modern CAE software tools for the design of microwave and wireless components. This study presents accurate and suitable general expressions for all micromachined SMM lines with a wide range of (w/h) ratio varying between 1 and 10. A micromachined branch line coupler operating at 80 GHz will be designed to demonstrate the usefulness of these design equations.

Keywords

curve fitting; electric impedance; method of moments; micromechanical devices; microstrip lines; microwave devices; characteristic impedance; closed-form formulas; curve-fitting techniques; electromagnetic parameters; frequency 80 GHz; method of moments analysis; micromachined shielded membrane microstrip line; Couplers; Impedance; Microstrip; Microwave circuits; Moment methods; Silicon; Analytical expressions; EM parameters; Micromachined branch line coupler; Micromachined line; MoM results; Shielded membrane microstrip line (SMM);

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Signals and Devices (SSD), 2011 8th International Multi-Conference on

Conference_Location

Sousse

Print_ISBN

978-1-4577-0413-0

Type

conf

DOI

10.1109/SSD.2011.5767386

Filename

5767386