DocumentCode
3138740
Title
Poisson´s ratio of GaAs
Author
Usher, B.F. ; Zhou, D. ; Goh, S.C. ; Warminski, T. ; Huang, X.P.
Author_Institution
Dept. of Electron. Eng., LaTrobe Univ., Bundoora, Vic., Australia
fYear
1999
fDate
1999
Firstpage
290
Lastpage
293
Abstract
Most epitaxial layer growth involves mismatch between layer and growth substrate, even in the case of nearly lattice matched systems such as GaAs/AlAs. The accurate determination of layer thicknesses and stoichiometry in single and multi-layer heterostructures by x-ray diffraction requires knowledge of the elastic properties of the layers so that accurate account can be taken of strain effects. A novel technique has been developed which allows Poisson´s ratio to be determined by measuring a semiconductor sample in both the pseudomorphic and completely relaxed states. The relationship between the two strain states determines the material´s Poisson ratio and this has been found to be 0.320±0.001 for GaAs
Keywords
III-V semiconductors; Poisson ratio; X-ray diffraction; cathodoluminescence; gallium arsenide; semiconductor epitaxial layers; GaAs; Poisson ratio; X-ray diffraction; epitaxial layer; lattice mismatch; layer thickness; multilayer heterostructures; pseudomorphic states; relaxed states; single layer heterostructures; stoichiometry; Capacitive sensors; Chemicals; Distortion measurement; Epitaxial layers; Gallium arsenide; Lattices; Strain measurement; Substrates; X-ray diffraction; X-ray scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
Conference_Location
Perth, WA
Print_ISBN
0-7803-4513-4
Type
conf
DOI
10.1109/COMMAD.1998.791644
Filename
791644
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