DocumentCode :
3138740
Title :
Poisson´s ratio of GaAs
Author :
Usher, B.F. ; Zhou, D. ; Goh, S.C. ; Warminski, T. ; Huang, X.P.
Author_Institution :
Dept. of Electron. Eng., LaTrobe Univ., Bundoora, Vic., Australia
fYear :
1999
fDate :
1999
Firstpage :
290
Lastpage :
293
Abstract :
Most epitaxial layer growth involves mismatch between layer and growth substrate, even in the case of nearly lattice matched systems such as GaAs/AlAs. The accurate determination of layer thicknesses and stoichiometry in single and multi-layer heterostructures by x-ray diffraction requires knowledge of the elastic properties of the layers so that accurate account can be taken of strain effects. A novel technique has been developed which allows Poisson´s ratio to be determined by measuring a semiconductor sample in both the pseudomorphic and completely relaxed states. The relationship between the two strain states determines the material´s Poisson ratio and this has been found to be 0.320±0.001 for GaAs
Keywords :
III-V semiconductors; Poisson ratio; X-ray diffraction; cathodoluminescence; gallium arsenide; semiconductor epitaxial layers; GaAs; Poisson ratio; X-ray diffraction; epitaxial layer; lattice mismatch; layer thickness; multilayer heterostructures; pseudomorphic states; relaxed states; single layer heterostructures; stoichiometry; Capacitive sensors; Chemicals; Distortion measurement; Epitaxial layers; Gallium arsenide; Lattices; Strain measurement; Substrates; X-ray diffraction; X-ray scattering;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
Conference_Location :
Perth, WA
Print_ISBN :
0-7803-4513-4
Type :
conf
DOI :
10.1109/COMMAD.1998.791644
Filename :
791644
Link To Document :
بازگشت