• DocumentCode
    3138740
  • Title

    Poisson´s ratio of GaAs

  • Author

    Usher, B.F. ; Zhou, D. ; Goh, S.C. ; Warminski, T. ; Huang, X.P.

  • Author_Institution
    Dept. of Electron. Eng., LaTrobe Univ., Bundoora, Vic., Australia
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    290
  • Lastpage
    293
  • Abstract
    Most epitaxial layer growth involves mismatch between layer and growth substrate, even in the case of nearly lattice matched systems such as GaAs/AlAs. The accurate determination of layer thicknesses and stoichiometry in single and multi-layer heterostructures by x-ray diffraction requires knowledge of the elastic properties of the layers so that accurate account can be taken of strain effects. A novel technique has been developed which allows Poisson´s ratio to be determined by measuring a semiconductor sample in both the pseudomorphic and completely relaxed states. The relationship between the two strain states determines the material´s Poisson ratio and this has been found to be 0.320±0.001 for GaAs
  • Keywords
    III-V semiconductors; Poisson ratio; X-ray diffraction; cathodoluminescence; gallium arsenide; semiconductor epitaxial layers; GaAs; Poisson ratio; X-ray diffraction; epitaxial layer; lattice mismatch; layer thickness; multilayer heterostructures; pseudomorphic states; relaxed states; single layer heterostructures; stoichiometry; Capacitive sensors; Chemicals; Distortion measurement; Epitaxial layers; Gallium arsenide; Lattices; Strain measurement; Substrates; X-ray diffraction; X-ray scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials Devices, 1998. Proceedings. 1998 Conference on
  • Conference_Location
    Perth, WA
  • Print_ISBN
    0-7803-4513-4
  • Type

    conf

  • DOI
    10.1109/COMMAD.1998.791644
  • Filename
    791644